A Light-Weight Neural Network for Wafer Map Classification Based on Data Augmentation

被引：0
|
作者：
Tsai, Tsung-Han [1 ]
Lee, Yu-Chen [1 ]
机构：
[1] Department of Electrical Engineering, National Central University, Taoyuan City, Taiwan
来源：
IEEE Transactions on Semiconductor Manufacturing | 2020年 / 33卷 / 04期
关键词：
31;
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页码：663 / 672
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