High-quality AlN nucleation layer on SiC substrate grown by MOVPE: Growth, structural and optical characteristics

被引:0
|
作者
Narang, Kapil [1 ,2 ]
Pandey, Akhilesh [1 ]
Khan, Ruby [1 ]
Singh, Vikash K. [1 ]
Bag, Rajesh K. [1 ]
Padmavati, M.V.G. [1 ]
Tyagi, Renu [1 ]
Singh, Rajendra [2 ]
机构
[1] Solid State Physics Laboratory, Timarpur, Lucknow Road, Delhi,110054, India
[2] Department of Physics, Indian Institute of Technology Delhi, Hauz Khas, New Delhi,110016, India
关键词
549.3; Others; including Bismuth; Boron; Cadmium; Cobalt; Mercury; Niobium; Selenium; Silicon; Tellurium and Zirconium - 712.1 Semiconducting Materials - 741.1 Light/Optics - 804.1 Organic Compounds - 804.2 Inorganic Compounds - 921.3 Mathematical Transformations - 931.2 Physical Properties of Gases; Liquids and Solids - 933.1.2 Crystal Growth - 951 Materials Science;
D O I
暂无
中图分类号
学科分类号
摘要
45
引用
收藏
相关论文
共 50 条
  • [1] High-quality AlN nucleation layer on SiC substrate grown by MOVPE: Growth, structural and optical characteristics
    Narang, Kapil
    Pandey, Akhilesh
    Khan, Ruby
    Singh, Vikash K.
    Bag, Rajesh K.
    Padmavati, M. V. G.
    Tyagi, Renu
    Singh, Rajendra
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2022, 278
  • [2] MOVPE growth of high-quality AlN
    Dadgar, A.
    Krost, A.
    Christen, J.
    Bastek, B.
    Bertram, F.
    Krtschil, A.
    Hempel, T.
    Blaesing, J.
    Haboeck, U.
    Hoffmann, A.
    JOURNAL OF CRYSTAL GROWTH, 2006, 297 (02) : 306 - 310
  • [3] Nucleation layer design for growth of a high-quality AlN epitaxial film on a Si(111) substrate
    Li, Yuan
    Wang, Wenliang
    Li, Xiaochan
    Huang, Liegen
    Zheng, Yulin
    Chen, Xiwu
    Li, Guoqiang
    CRYSTENGCOMM, 2018, 20 (11): : 1483 - 1490
  • [4] Threading dislocations in heteroepitaxial AlN layer grown by MOVPE on SiC (0001) substrate
    Taniyasu, Yoshitaka
    Kasu, Makoto
    Makimoto, Toshiki
    JOURNAL OF CRYSTAL GROWTH, 2007, 298 : 310 - 315
  • [5] Characterization of high-quality epitaxial AlN films grown by MOVPE
    Shibata, T
    Asai, K
    Nagai, T
    Sumiya, S
    Tanaka, M
    Oda, O
    Miyake, H
    Hiramatsu, K
    GAN AND RELATED ALLOYS-2001, 2002, 693 : 541 - 544
  • [6] High-Quality ZnO Layers Grown by CVD on Sapphire Substrates with an AlN Nucleation Layer
    Muller, Raphael
    Huber, Florian
    Toews, Matthias
    Mangold, Martin
    Madel, Manfred
    Scholz, Jan-Patrick
    Minkow, Alexander
    Herr, Ulrich
    Thonke, Klaus
    CRYSTAL GROWTH & DESIGN, 2020, 20 (06) : 3918 - 3926
  • [7] High-quality GaN growth on AlN/sapphire templates by MOVPE
    Sakai, M
    Ishikawa, H
    Egawa, T
    Jimbo, T
    Umeno, M
    Shibata, T
    Asai, K
    Sumiya, S
    Kuraoka, Y
    Tanaka, M
    Oda, O
    COMPOUND SEMICONDUCTORS 2001, 2002, (170): : 783 - 788
  • [8] High quality AlN grown on double layer AlN buffers on SiC substrate for deep ultraviolet photodetectors
    Al Tahtamouni, T. M.
    Lin, J. Y.
    Jiang, H. X.
    APPLIED PHYSICS LETTERS, 2012, 101 (19)
  • [9] Growth of high-quality AlN at high growth rate by high-temperature MOVPE
    Fujimoto, N.
    Kitano, T.
    Narita, G.
    Okada, N.
    Balakrishnan, K.
    Iwaya, M.
    Kamiyama, S.
    Amano, H.
    Akasaki, I.
    Shimono, K.
    Noro, T.
    Takagi, T.
    Bandoh, A.
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 3, NO 6, 2006, 3 (06): : 1617 - 1619
  • [10] Optical and structural studies of high-quality bulk-like GaN grown by HVPE on a MOVPE AIN buffer layer
    Gogova, D.
    Siche, D.
    Fornari, R.
    Monemar, B.
    Gibart, P.
    Dobos, L.
    Pecz, B.
    Tuomisto, F.
    Bayazitov, R.
    Zollo, G.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2006, 21 (05) : 702 - 708