Multi-band microbolometer in CMOS technology

被引：1

作者：

Liao, Yiming ^{[1
]}

Wang, Ke ^{[2
]}

Zhou, Wenbin ^{[2
]}

Yan, Feng ^{[2
]}

Ji, Xiaoli ^{[2
]}

机构：

[1] Nanjing Univ Sci & Technol, Sch Microelect, Nanjing 210094, Jiangsu, Peoples R China

[2] Nanjing Univ, Sch Elect Sci & Engn, Nanjing 210046, Jiangsu, Peoples R China

来源：

OPTICS EXPRESS | 2024年 / 32卷 / 15期

关键词：

STRUCTURAL-PROPERTIES; SILICON; PARAMETERS; FILMS; TCR;

D O I：

10.1364/OE.530379

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Multi-spectral imaging enhances the information diversity of the object with complex, expensive, and low integrated components. Here, we demonstrated an antenna-coupled microboloSiO2 absorption and L-shaped fractal antenna to achieve multi-band detection from infrared (IR) to terahertz (THz). Experimental results demonstrate that the detector can achieve high sensitivity detection in both THz and IR bands, with the maximum detectivity of 5 (108 cm<middle dot>Hz1/2/W @305 GHz and 7 (108 cm<middle dot>Hz1/2/W @8.55 mu m, respectively. The presented multi-spectral detector is easily implementable in integrated circuit process, conducive to high-density, low-cost, and high-performance array imaging.

引用

页码：25805 / 25817

页数：13

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