Integrated silicon photonic MEMS (vol 9, 27, 2023)

被引：0
|
作者：
Quack, Niels
Takabayashi, Alain Yuji
Sattari, Hamed
Edinger, Pierre
Jo, Gaehun
Bleiker, Simon J.
Errando-Herranz, Carlos
Gylfason, Kristinn B.
Niklaus, Frank
Khan, Umar
Verheyen, Peter
Mallik, Arun Kumar
Lee, Jun Su
Jezzini, Moises
Zand, Iman
Morrissey, Padraic
Antony, Cleitus
O'Brien, Peter
Bogaerts, Wim
机构：
来源：
MICROSYSTEMS & NANOENGINEERING | 2024年 / 10卷 / 01期
关键词：
D O I：
10.1038/s41378-023-00649-2
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页数：1
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