Modelling of the Dynamic Process in the Microbeam of the MEMS Resonators

被引：0

作者：

Rebot, Dariya ^{[1
]}

Shcherbovskykh, Serhiy ^{[1
]}

Stefanovych, Tetyana ^{[1
]}

Topilnytskyy, Volodymyr ^{[2
]}

机构：

[1] Lviv Polytech Natl Univ, Comp Design Syst Dept, Lvov, Ukraine

[2] Lviv Polytech Natl Univ, Design & Operat Mashines Dept, Lvov, Ukraine

来源：

2024 IEEE 19TH INTERNATIONAL CONFERENCE ON THE PERSPECTIVE TECHNOLOGIES AND METHODS IN MEMS DESIGN, MEMSTECH 2024 | 2024年

关键词：

Resonator; mathematical modeling; clamped beam; oscillations;

D O I：

10.1109/MEMSTECII63437.10620037

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A mathematical model has been developed to describe the dynamics of the microbeam of the MEMS resonator, taking into account its physical and mechanical characteristics. The model was obtained using asymptotic mechanics methods. It allows for the investigation of the influence of various parameters on the amplitude-frequency characteristics of the microbeam and, consequently, the efficiency of the resonator. This will enable optimization at both the design stage and when selecting operating modes. The resulting model can be included in the general models for researching MEMS resonators and integrated into their automated calculation and design systems.

引用

页码：93 / 96

页数：4

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