共 50 条
- [21] Enhancing temperature sensing features of FBGs by use of thin film aluminium coating FIFTH EUROPEAN WORKSHOP ON OPTICAL FIBRE SENSORS, 2013, 8794
- [29] Wafer-Level Thin Film Encapsulation for RF MEMS Using SiN/ SU-8 Membrane 2022 IEEE 9TH ELECTRONICS SYSTEM-INTEGRATION TECHNOLOGY CONFERENCE, ESTC, 2022, : 610 - 613
- [30] Bimetallic thin film grayscale photomasks for complex 3D microstructure creation in SU-8 2007 CANADIAN CONFERENCE ON ELECTRICAL AND COMPUTER ENGINEERING, VOLS 1-3, 2007, : 959 - 962