Optimizing optomechanical resonators for ultra-high-frequency timing applications

被引:1
|
作者
Furcatte, Thomas [1 ]
Barcelo, Joan [1 ,2 ]
Trzpil, Wioletta [1 ]
Gely, Marc [1 ]
Mendes, Munique Kazar [1 ]
Jourdan, Guillaume [1 ]
Hentz, Sebastien [1 ]
Sansa, Marc [1 ]
机构
[1] Univ Grenoble Alpes, CEA Leti, F-38000 Grenoble, France
[2] Univ Illes Balears, Elect Syst Grp, Palma De Mallorca 07122, Spain
来源
2024 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS, DTIP 2024 | 2024年
关键词
Optomechanics; oscillator; MEMS; highfrequency; timing reference; disk resonator; bullseye resonator;
D O I
10.1109/DTIP62575.2024.10613067
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Optomechanical resonators emerge as a compelling high-performance alternative for GHz timing references, thanks to the intrinsic assets of this transduction over electrical methods. However, timing applications present system-level design challenges necessitating a particular approach to the design of the resonators. Here we present the first study of such constraints, and provide general design guidelines. Starting from the identification of key performance parameters, we explore the relevance of two optomechanical resonator geometries. First, we experimentally study silicon microdisks, which garner significant attention for sensing purposes, unveiling their suboptimal suitability for timing applications. Then we introduce an alternative geometry, based on a ring-like mechanical structure. We elucidate its advantages in terms of quality factor and dynamic range, and clarify its design principles. It is anticipated that the ring-like resonators will exceed existing performance standards for oscillators, thereby facilitating operation across frequency ranges spanning from 1 GHz to 5 GHz.
引用
收藏
页数:6
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