EUV Scatterometry - Low-Dose Characterization of Polymer-based Metamaterials

被引：0

作者：

Jenkins, Nicholas W. ^{[1
]}

Esashi, Yuka ^{[1
]}

Shao, Yunzhe ^{[1
]}

Tanksalvala, Michael ^{[1
]}

Kapteyn, Henry C. ^{[1
,2
]}

Murnane, Margaret M. ^{[1
]}

Atkinson, Matthew ^{[3
]}

机构：

[1] Univ Colorado, JILA, STROBE NSF Sci & Technol Ctr, Boulder, CO 80309 USA

[2] KMLabs Inc, Boulder, CO 80301 USA

[3] 3M Co, Corp Res Analyt Lab, St Paul, MN 55144 USA

来源：

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII | 2024年 / 12955卷

关键词：

EUV metrology; reflectometry; scatterometry; phase retrieval; ptychography; high-harmonic generation; low-dose;

D O I：

10.1117/12.3009911

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

We present recent experiments conducted with our tabletop EUV reflectometer to characterize the detailed geometry, composition, and topography of several nanostructured, polymer-based samples. The EUV measurements are performed without sample damage or any significant sample preparation. Correlative STEM measurements confirm the EUV results, but require extensive sample preparation.

引用

页数：3

共 50 条

[1] Advancements and challenges in polymer-based mechanical metamaterials
Ayadi, Abderrahmane
Krawczak, Patricia
EXPRESS POLYMER LETTERS, 2025, 19 (02): : 122 - 123
[2] LOW-DOSE CHARACTERIZATION
KEENAN, WA
DEMING, RO
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (03) : C102 - C102
[3] Review: Auxetic Polymer-Based Mechanical Metamaterials for Biomedical Applications
Veerabagu, Udayakumar
Palza, Humberto
Quero, Franck
ACS BIOMATERIALS SCIENCE & ENGINEERING, 2022, 8 (07) : 2798 - 2824
[4] POLYMER-BASED DEVICES THEIR FUNCTION AND CHARACTERIZATION
WILLANDER, M
ASSADI, A
SVENSSON, C
SYNTHETIC METALS, 1993, 57 (01) : 4099 - 4104
[5] Exploring electroactive microenvironments in polymer-based nanocomposites to sensitize bacterial cells to low-dose emb e dde d silver nanoparticles
Moreira, Joana
Fernandes, Margarida M.
Carvalho, Estela O.
Nicolau, Ana
Lazic, Vesna
Nedeljkovic, Jovan M.
Lanceros-Mendez, Senentxu
ACTA BIOMATERIALIA, 2022, 139 : 237 - 248
[6] Large deformation of shape-memory polymer-based lattice metamaterials
Pirhaji, Alireza
Jebellat, Ehsan
Roudbarian, Nima
Mohammadi, Kaivan
Movahhedy, Mohammad R.
Zaeem, Mohsen Asle
INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES, 2022, 232
[7] Characterization of a polymer-based MEMS packaging technique
Monajemi, Pejman
Joseph, Paul J.
Kohl, Paul A.
Ayazi, Farrokh
IEEE CPMT: INTERNATIONAL SYMPOSIUM AND EXHIBITION ON ADVANCED PACKAGING MATERIALS: PROCESSES, PROPERTIES AND INTERFACES, 2006, : 139 - +
[8] CHARACTERIZATION BY IMPEDANCE SPECTROSCOPY OF A POLYMER-BASED SUPERCAPACITOR
ARBIZZANI, C
MASTRAGOSTINO, M
MENEGHELLO, L
ELECTROCHIMICA ACTA, 1995, 40 (13-14) : 2223 - 2228
[9] Preparation and Characterization of a Polymer-Based "Molecular Accordion"
Karoyo, Abdalla H.
Wilson, Lee D.
LANGMUIR, 2016, 32 (12) : 3066 - 3078
[10] Functional characterization of a conducting polymer-based immunoassay system
Fare, TL
Cabelli, MD
Dallas, SM
Herzog, DP
BIOSENSORS & BIOELECTRONICS, 1998, 13 (3-4): : 459 - 470

← 1 2 3 4 5 →