Reliability Assesement of Ferroelectric nvCAP for Small-signal Capacitive Read-out

被引:2
|
作者
Phadke, Omkar [1 ]
Mulaosmanovic, Halid [2 ]
Duenkel, Stefan [2 ]
Beyer, Sven [2 ]
Yu, Shimeng [1 ]
机构
[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA
[2] GlobalFoundries Fab1 LLC & Co KG, D-01109 Dresden, Germany
关键词
ferroelectrics; non-volatile capacitor; endurance; retention; multi-level cell; recovery;
D O I
10.1109/IRPS48228.2024.10529440
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Unlike the conventional way to use drain current as the read-out mechanism, ferroelectric field effect transistor (FeFET) can be read-out in a capacitive manner, namely nonvolatile capacitor (nvCAP) mode. This small-signal nvCAP mode is different from large-signal P-V read-out in the ferroelectric random-access memory (FeRAM) configuration. The reliability aspects such as endurance, retention, and multi-level cell (MLC) are evaluated for the first time in this study. The tunable capacitance CGS-CGD of FeFET devices in 28nm foundry platform was programmed to ON and OFF states. Impact of defect generation and charge-trapping during the ferroelectric switching on the endurance and retention behavior of nvCAP is investigated. We find that the device sustains up to 107 programerase cycles until the Con/Coff ratio becomes similar to 1, and a C-V sweep performed on the fatigued device help 'recover' the device performance. By repeatedly performing recovery-endurance operation, we demonstrate a recovered endurance of 108 cycles.
引用
收藏
页数:5
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