[1] Suzhou Univ Sci & Technol, Sch Mat Sci & Engn, Suzhou Key Lab Nanophoton & Nanoelect Mat & Its De, Suzhou 215009, Jiangsu, Peoples R China
[2] State Key Labs Transducer Technol, Shanghai 200050, Peoples R China
[3] Shanghai Jiao Tong Univ, Sch Elect, Dept Micro Nano Elect, Key Lab Thin Film & Microfabricat Minist Educ, Shanghai 200240, Peoples R China
[4] Shanghai Univ Engn Sci, Sch Mat Sci & Engn, Shanghai 201620, Peoples R China