Experimental Investigation of Nonlinear Modulation Characteristics of Mode Localization in Electrostatic Coupled Resonators

This paper focuses on the typical configuration of double ended fixed supported electrostatic coupled resonators in mode localization phenomena, and conducts in-depth research on the influence of nonlinear coefficients in electrostatic coupled resonators on their vibration behavior. Firstly, the designed devices are processed based on the standard process of SOI, and the printed circuit board (PCB) of the test circuit is designed using Altium Designer software to connect external circuits with the tested device. Secondly, the working principles of electrostatic drive and capacitance detection are elucidated, and the mechanical model in the system is transformed into an electrical model through equivalent circuit principles, thereby revealing the influence of parasitic feedthrough capacitance on the detection signal. Finally, an open- loop testing circuit was built in a vacuum environment to test the modal localization characteristics of the electrostatic coupling resonator and the performance of the mode localization acceleration sensor.