Detector-integrated vertical-cavity surface-emitting laser with a movable high-contrast grating mirror

被引：0
|
作者：
Wang, Minglu [1 ,2 ,3 ]
Peng, Hongling [4 ]
Hao, Chenxi [1 ,2 ]
Zhou, Xuyan [4 ]
Zheng, Wanhua [2 ,4 ]
Liu, Anjin [1 ,2 ]
机构：
[1] Chinese Acad Sci, Inst Semicond, Key Lab Optoelect Mat & Devices, Beijing 100083, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100049, Peoples R China
[4] Chinese Acad Sci, Inst Semicond, Key Lab Solid State Optoelect Informat Technol, Beijing 100083, Peoples R China
来源：
PHOTONICS RESEARCH | 2024年 / 12卷 / 07期
基金：
中国国家自然科学基金;
关键词：
SILICON PHOTONICS; SWEPT-SOURCE; HIGH-SPEED; VCSEL; SPECTROSCOPY; EMISSION; INDEX; ARRAY;
D O I：
10.1364/PRJ.519679
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this paper, we present a detector-integrated vertical-cavity surface-emitting laser (VCSEL) with a movable highcontrast grating (HCG) mirror in an n-i-p-i-n manner. The detector-integrated VCSEL with a movable HCG can achieve three functions, including wavelength tuning, power monitoring, and resonant-cavity-enhanced (RCE) photon detection. Currently, the device can achieve a wavelength tuning range of 27 nm at room temperature when the suspended HCG is driven by the reverse-bias voltage. The n-i-p structure located at the upper part of the device can serve as an intra-cavity photodiode to monitor the output power due to the defect absorption. The RCE photon detection function of the detector-integrated VCSEL with a movable HCG is measured, and it has a peak responsivity at about 926 nm. This detector-integrated VCSEL with a movable HCG will be useful for sensing and imaging. (c) 2024 Chinese Laser Press
引用
收藏
页码：1437 / 1448
页数：12
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