Investigation of plasma chamber erosion in an RF ion source

被引：1
|
作者：
George, A. [1 ,3 ]
Melanson, S. [3 ]
Dehnel, M. [2 ,3 ]
Hoehr, C. [1 ,2 ]
机构：
[1] TRIUMF, Life Sci, 4004 Wesbrook Mall, Vancouver, BC, Canada
[2] UBC O, Med Phys, Kelowna, BC, Canada
[3] D Pace, 625 Front St 305, Nelson, BC V1L 4B6, Canada
来源：
20TH INTERNATIONAL CONFERENCE ON ION SOURCES | 2024年 / 2743卷
关键词：
D O I：
10.1088/1742-6596/2743/1/012006
中图分类号：
O412 [相对论、场论]; O572.2 [粒子物理学];
学科分类号：
摘要：
Filament driven plasma sources are widely used to produce ion beams, but they require frequent maintenance due to the limited filament lifetime. External radio-frequency (RF) coupled ion source offers a filament-free plasma and hence better maintenance. However, one of the issues encountered during the development of a planar external RF-powered ion source at D-Pace was the erosion of its copper plasma chamber and subsequent formation of copper deposits on the Aluminum Nitride (AlN) RF window. The copper deposits on the RF window deteriorate the power coupling between the external antenna and the plasma. This paper investigates the erosion of the plasma chamber and describes some of the methods used to control the deposition of copper on the RF window.
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页数：6
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