Compact Single-Shot Dual-Wavelength Interferometry for Large Object Measurement with Rough Surfaces

被引:0
|
作者
Yan, Yizhang [1 ]
Veetil, Suhas P. [2 ]
Zhu, Pengfei [1 ]
Gao, Feng [1 ]
Kong, Yan [1 ]
He, Xiaoliang [1 ]
Sun, Aihui [1 ]
Jiang, Zhilong [1 ]
Liu, Cheng [1 ]
机构
[1] Jiangnan Univ, Sch Sci, Computat Opt Lab, Wuxi 214122, Peoples R China
[2] Higher Coll Technol, Dept Engn Technol & Sci, Dubai 999041, U Arab Emirates
基金
中国国家自然科学基金;
关键词
dual-wavelength interferometry; surface profile measurement; single shot; polarization camera; AXIS DIGITAL HOLOGRAPHY; PHASE RETRIEVAL; MICROSCOPY; ENHANCEMENT;
D O I
10.3390/photonics11060518
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Single-shot dual-wavelength interferometry offers a promising avenue for surface profile measurement of dynamic objects. However, current techniques employing pixel multiplexing or color cameras encounter challenges such as complex optical alignment, limited measurement range, and difficulty in measuring rough surfaces. To address these issues, this study presents a novel approach to single-shot dual-wavelength interferometry. By utilizing separated polarization illumination and detection, along with a monochromatic polarization camera and two slightly different wavelengths, this method enables the simultaneous recording of two frames of separated interferometric patterns. This approach facilitates straightforward optical alignment, expands measurement ranges, accelerates data acquisition, and simplifies data processing for dual-wavelength interferometry. Consequently, it enables online shape measurement of large dynamic samples with rough surfaces.
引用
收藏
页数:12
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