Modernization of Vacuum-Arc Deposition Technology of Multilayer Nanostructured Coatings, Metallofiz

被引：0
|
作者：
Serdiuk, I., V [1 ]
Stolbovyi, V. O. [1 ]
Dolomanov, A., V [1 ]
Domnich, V. M. [1 ]
机构：
[1] NAS Ukraine, Kharkiv Inst Phys & Technol, Natl Sci Ctr, 1 Akad Str, UA-61108 Kharkiv, Ukraine
来源：
METALLOPHYSICS AND ADVANCED TECHNOLOGIES | 2022年 / 44卷 / 04期
关键词：
vacuum-arc deposition; multilayer coatings; cathode; gas inlet; programmable digital device; nanostructured coatings;
D O I：
10.15407/mfint.44.04.0547
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The modernization of the vacuum-arc deposition technology of multilayer coatings is carried out. A prototype of a device designed to control the operation of cathodes and gas inlets in the process of applying simple and complex multilayer nanostructured vacuum-arc coatings is developed. This device is a 2-channel programmable digital device, one of the channels of which controls the operation of the cathodes, and the other channel controls the operation of the gas inlets. Thus, there is a possibility of simultaneous operation of two cathodes and two gas inlets. The thickness of the layers of the vacuum-arc coating, as well as the order of their application, can be regulated by the modes and duration of the operation of the control device channels. The use of this device makes it possible to obtain multilayer vacuum-arc WNbN/WNbC coatings with a microhardness of 27-31 GPa.
引用
收藏
页码：547 / 563
页数：147
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