New paradigm of Yield analysis in Big Data and AI Era in Semiconductor Manufacturing

被引：0
|
作者：
David, Jeffrey [1 ]
Gupta, Ashutosh [1 ]
Bamb, Rishi [1 ]
Akar, Said [1 ]
Holt, Jonathan [1 ]
Strojwas, Andrzej [1 ]
Brozek, Tomasz [1 ]
机构：
[1] PDF Solut Inc, Santa Clara, CA 95050 USA
来源：
8TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM 2024 | 2024年
关键词：
yield analysis; AI/ML predictive yield models;
D O I：
10.1109/EDTM58488.2024.10512106
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The paper describes how the semiconductor product yield analysis evolved from simple one-way correlation analysis limited by siloed data into powerful cloud based and AI/ML enhanced analytics tool. We discuss the tasks and efforts needed to align all data types, create the Big Data accessible repositories, and deploy end-to-end analytics, updating the AI/ML models using incoming new yield data stream.
引用
收藏
页码：783 / 785
页数：3
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