Transmission spectrum analysis of ceramic-shielded microwave cutoff probes in low-pressure plasmas

被引:0
|
作者
Hwang, Do-Yeon [1 ,2 ]
Yeom, Hee-Jung [1 ]
Lee, Gawon [2 ]
Kim, Jung-Hyung [1 ]
Lee, Hyo-Chang [3 ,4 ]
机构
[1] Korea Res Inst Stand & Sci, Daejeon 34113, South Korea
[2] Chungnam Natl Univ, Dept Elect Engn, Daejeon 34134, South Korea
[3] Korea Aerosp Univ, Dept Semicond Sci Engn & Technol, Goyang 10540, South Korea
[4] Korea Aerosp Univ, Sch Elect & Informat Engn, Goyang 10540, South Korea
基金
新加坡国家研究基金会;
关键词
DENSITY;
D O I
10.1063/5.0214696
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this study, the influence of ceramic shield characteristics, including thickness and geometry, on the transmission spectrum and electron density measurements of a ceramic shield cutoff probe (CSC) was investigated to measure high-density or process plasma. Through electromagnetic simulations and circuit modeling, we examined the measurement characteristics of the CSC based on different ceramic shield geometries. When the ceramic shield is sufficiently thin, it does not affect the CSC wave transmission characteristics. However, for a thick ceramic shield, a cutoff frequency shift of up to 3% toward the lower side can occur. This shift is attributed to the electrical properties of the ceramic material, which can function as a parasitic capacitor. In addition, when fabricating a CSC, depending on the shape of the ceramic shield or the method used to couple it with the CSC body, a cutoff frequency shift can occur toward the lower side. The simulation results were validated through experiments, revealing a cutoff frequency shift toward the lower side of up to 18.0% in the simulations and up to 11.6% in the experiments. The findings of this study could assist in high-density or processing plasma measurements using cutoff probes.
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页数:9
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