Microstructure and mechanical properties of Fe-N/TiN magnetic multilayers with different thickness of TiN layers

被引：0
|
作者：
LawrenceK.Y.Li
机构：
[1] Deptof MEEM City University of Hong Kong
[2] Hong
来源：
ScienceinChina,SerA. | 2001年 / Ser.A.2001(S1)卷 / S1期
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中图分类号：
TG179 [各种工业的腐蚀及防腐新方法];
学科分类号：
摘要：
<正> Fe-N/TiN multilayers (MLs) with different thickness of TiN layers and 20nm thickness ofFe-N layers deposited by DC magnetron sputtering technique were studied. The structure andcomposition of MLs were characterized with low-angle X-ray diffraction (LXRD), Augur depth pro-file and X-ray diffraction (XRD). The hardness and reduced elastic modulus of these multilayerswere studied using a nano-hardness tester (NHT). The bonding strength between the MLs and thesubstrate was measured using a nano-scratch tester (NST). Effects of the thickness of the TiNlayer on critical load, hardness and reduced elastic modulus of the MLs were studied.
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页码：375 / 380
页数：6
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