Hard and tough (NbTaMoW)Nx high entropy nitride films with sub-stoichiometric nitrogen

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Li, Hang [1 ]
Jiang, Nan [1 ]
Li, Jianliang [1 ]
Huang, Jiewen [1 ]
Kong, Jian [1 ]
Xiong, Dangsheng [1 ]
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[1] School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing,210094, China
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