Development and practical application of non-contact and high accuracy rotary encoder system with self-calibration

被引：0
|
作者：
Ishii N.
Taniguchi K.
Eguchi S.
Kimisawa Y.
Okoshi S.
机构：
来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2019年 / 85卷 / 02期
关键词：
Angular measurement; Compensation; High resolution; Non-contact measurement; Rotary encoder; Self-calibration; Ultra-precision;
D O I：
10.2493/jjspe.85.137
中图分类号：
学科分类号：
摘要：
[No abstract available]
引用
收藏
页码：137 / 140
页数：3
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