Ru/Sr Multilayer Mirrors for the Spectral Range 9-12 nm

被引：0
|
作者：
Shaposhnikov, R. A. [1 ]
Zuev, S. Yu. [1 ]
Polkovnikov, V. N. [1 ]
Salashchenko, N. N. [1 ]
Chkhalo, N. I. [1 ]
机构：
[1] Russian Acad Sci, Inst Phys Microstruct, Nizhnii Novgorod 607680, Russia
来源：
TECHNICAL PHYSICS | 2024年 / 69卷 / 03期
关键词：
multilayer X-ray mirrors; X-ray lithography; X-ray radiation;
D O I：
10.1134/S1063784224020312
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The results of studies of Ru/Sr multilayer mirrors optimized for the working wavelength range of 9-12 nm are presented in the paper. Within the framework of the presented article the strontium based multilayer structures with stable over time reflective characteristics were obtained for the first time. It is shown that Ru/Sr mirrors have the highest reflectance of all known reflective coatings, with the exception of beryllium-containing, in the spectral range of 9-12 nm.
引用
收藏
页码：713 / 718
页数：6
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