Ultraviolet photo-enhanced atomic layer deposition for improving dielectric properties of low temperature deposited Al2O3

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作者：
Holden, Konner E. K. [1 ]
Witsell, Shane M. [1 ]
Lemaire, Paul C. [2 ]
Conley, John F. [1 ]
机构：
[1] School of Electrical Engineering and Computer Science, Oregon State University, Corvallis,OR,97331, United States
[2] Lam Research Corporation, Tualatin,OR,97062, United States
来源：
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2022年 / 40卷 / 04期
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