Structure design of two-axis fast steering mirror for aviation optoelectronic platform

被引：0
|
作者：
Tan S. [1 ,2 ,3 ]
Wang F. [1 ,2 ]
Xu Y. [1 ,2 ]
Wang Y. [1 ,2 ,3 ]
Li Q. [1 ,2 ,3 ]
机构：
[1] Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun
[2] University of Chinese Academy of Sciences, Beijing
[3] Key Laboratory of Airborne Optical Imaging and Measurement, Chinese Academy of Sciences, Changchun
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2022年 / 30卷 / 11期
关键词：
Biaxial flexible support; Fast steering mirror; Modal analysis; Surface shape accuracy;
D O I：
10.37188/OPE.20213000.0757
中图分类号：
学科分类号：
摘要：
To meet the demanding requirements of the aeronautical optoelectronic platform for surface accuracy and dynamic performance of the visible/infrared dual-band two-axis fast steering mirror, a lightweight flat mirror assembly and a flexible structure have been specifically designed. First, the design method of the fast steering mirror structure is summarized, their design elements are clarified, and the influence of assembly error is analyzed. A lightweight mirror supporting the center of the back is designed, and the high-precision assembly of the motor is realized through a positioning fixture. Then, based on the cross-shaped flexible bearing, the design of the biaxial flexible structure is realized. Finally, the surface accuracy and mode of the fast steering mirror are simulated and tested. The test results show that the surface shape accuracy (RMS) of the flat mirror is greater than 0.017λ (λ=632.8 nm), the closed-loop bandwidth of the fast steering mirror is higher than 200 Hz, and the position errors in both the X- and Y-directions are less than 1.2 μrad. As a result of achieving high surface accuracy and dynamic performance, the miniaturization and modularization of a fast steering mirror are realized, allowing them to function stably and reliably in complex aviation environments. © 2022, Science Press. All right reserved.
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页码：1344 / 1352
页数：8
相关论文
共 12 条
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