Application of Cerium Oxide Nanopowders for Silicon Polishing

被引：0

作者：

Chkhalo, N. I. ^{[1
]}

Akhsakhalyan, A. A. ^{[1
]}

Vainer, Yu. A. ^{[1
]}

Zorina, M. V. ^{[1
]}

Pestov, A. E. ^{[1
]}

Svechnikov, M. V. ^{[1
]}

Toropov, M. N. ^{[1
]}

Kumar, N. ^{[1
]}

Tokunov, Yu. M. ^{[2
]}

机构：

[1] Russian Acad Sci, Inst Phys Microstruct, Nizhnii Novgorod 607680, Russia

[2] MIPT, Dolgoprudnyi 141701, Moscow Oblast, Russia

来源：

TECHNICAL PHYSICS | 2024年 / 69卷 / 04期

关键词：

surface; roughness; X-ray optics; deep grinding-polishing; X-RAY-SCATTERING; SURFACES;

D O I：

10.1134/S106378422403006X

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The research methods and the first results obtained in the study of the roughness of single-crystal silicon (111) substrates processed at the final stage by various methods are described: traditional polishing without the use of chemical-mechanical polishing (CMP), with the use of CMP and without CMP, but with the use of oxide cerium nanopowders. The efficiency of using CeO2 nanopowders has been demonstrated. The following effective roughness values were obtained: without CMP-3.56 nm, with CMP-0.54 nm, and without CMP, but with CeO2 polishing-0.93 nm.

引用

页码：824 / 832

页数：9

共 50 条

[1] Cerium oxide as a mute to acid free polishing
Kelsall, A
GLASS TECHNOLOGY, 1998, 39 (01): : 6 - 9
[2] Effect of Surface Modification on Behaviors of Cerium Oxide Nanopowders
李梅
史振学
柳召刚
胡艳宏
王觅堂
励杭泉
Journal of Rare Earths, 2007, (03) : 368 - 372
[3] Effect of Surface Modification on Behaviors of Cerium Oxide Nanopowders
School of Materials Science and Engineering, Beijing University of Chemical Engineering, Beijing, 100029, China
不详
J Rare Earth, 2007, 3 (368-372):
[4] Effect of surface modification on behaviors of cerium oxide nanopowders
Li Mei
Shi Zhenxue
Liu Zhaogang
Hu Yanhong
Wang Mitang
Li Hangquan
JOURNAL OF RARE EARTHS, 2007, 25 (03) : 368 - 372
[5] Optical glass surfaces polishing by cerium oxide particles
Bouzid, D.
Belkhie, N.
Aliouane, T.
MATERIAUX 2010, 2012, 28
[6] Investigation of cerium oxide pellets for optical glass polishing
Bouzid, D
Zegadi, R
Jungstand, U
Herold, V
GLASS TECHNOLOGY, 2001, 42 (02): : 60 - 62
[7] Nanocrystalline cerium oxide - Improves glass polishing operations
Murray, PG
PHOTONICS SPECTRA, 2004, 38 (08) : 106 - 107
[8] Modifying the Surface of Cerium Oxide Nanopowders Produced by Physical Method
Vazirov, R. A.
Demin, A. M.
Bazhukova, I. N.
Myshkina, A., V
Sokovnin, S. Y.
Ilves, V. G.
Minin, A. S.
PROCEEDINGS OF THE II INTERNATIONAL CONFERENCE: MODERN SYNTHETIC METHODOLOGIES FOR CREATING DRUGS AND FUNCTIONAL MATERIALS (MOSM2018), 2019, 2063
[9] Development of alternative abrasives of cerium oxide for glass polishing
Lee, Seungbok
Kirino, Okiharu
Tani, Yasuhiro
Murata, Junji
Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, 2012, 78 (791): : 2710 - 2719
[10] Microwave assisted hydrothermal synthesis of engineered cerium oxide nanopowders
Mahmoud, Waleed E.
Faidah, A.
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2012, 32 (13) : 3537 - 3541

← 1 2 3 4 5 →