Molecular dynamics simulation of Mo sputtering by the Ar gas cluster ion beam

被引：0
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作者：
Nazarov, A.V. [1 ]
Zavilgelskiy, A.D. [1 ]
机构：
[1] Skobeltsyn Institute of Nuclear Physics, SINP, MSU, 1 , Leninskie gory, GSP-1, Moscow,119991, Russia
来源：
Applied Physics | 2019年 / 05期
关键词：
Molecular dynamics;
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摘要：
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页码：60 / 64
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