Cu doped AlSb polycrystalline thin films

Cu-doped AlSb polycrystalline films were grown on quartz glass by magnetron co-sputtering.The structural,morphological and electrical properties of the films were studied.The incorporation of copper atoms can result in the increase of lattice constants,and annealing is helpful to eliminate this deformation.Cu-doped AlSb films exhibit weak n-type conductivity.The results show that the doping effect has a close relationship with the annealing process,meaning that the position of Cu atom in AlSb polycrystalline films might influence the doping effect.