METAL-INSULATOR-SEMICONDUCTOR INVERSION LAYER SOLAR-CELLS BY USING RAPID THERMAL-PROCESSING

The possibility of producing solar cells using rapid thermal processing (RTP) was reported in recent years. This process was applied with good results to pn-solar cells. In this work we used the RTP technique for the metal-insulator-semiconductor (MIS) inversion layer cells. Simultaneously with the growth of the tunneling oxide at the front side a p(+)/p ''high-low'' junction forms by alloying the Al into Si at the back contact. The efficiencies reached with this process are about 15%. (C) 1995 American Institute of Physics.