OPTIMIZATION AND SPECIFICATION OF AUGER-ELECTRON SPECTROMETERS FOR SIGNAL-TO-NOISE RATIO PERFORMANCE

Data are provided for the intensities of the peak and background of the Cu L3M4,5M4,5 Auger electron peak measured using 5 and 10 keV electron beams as a function of the angle of incidence alpha, the angle of emission theta, and the spectrometer resolution R. These data allow the performance of an instrument for sensitivity or signal-to-noise ratio at one condition to be related to any other condition in the ranges 0 less-than-or-equal-to alpha less-than-or-equal-to 70-degrees and 0.1 less-than-or-equal-to R% less-than-or-equal-to 0.9. The performance of a cylindrical mirror analyser with a coaxial electron gun is calculated and the behaviour evaluated to show how the most sensitive operating regime differs from that of the hemispherical analyser with an input lens. Data are provided to relate the signal-to-noise ratio performances of these forms of instrument when recorded under separate conditions.