SENSITIVITY OF AN ANODICALLY OXIDIZED ALUMINUM FILM ON A SURFACE-ACOUSTIC-WAVE SENSOR TO HUMIDITY

The sensitivity, transient response and sensitivity mechanism of a surface acoustic wave humidity sensor using porous anodically oxidized aluminium (alumina) films as mechanical interfaces have been studied theoretically and experimentally. It is found that the sensitivity of alumina films of 1.0 mu m thickness is -0.034 m/(s %RH) and is the same order as that of polyimide films. The transient response of alumina films to humidity is about one order faster than that of polyimide films. For the sensitivity mechanism, the phase-velocity change is attributed to the mechanical perturbation caused by the adsorption of water molecules. The equivalent density change of alumina films between 0 and 100%RH is about 0.7%. In addition, the actual stiffness constants of alumina films are two orders less than those of bulk alumina.