DEPTH RESOLUTION OF MULTILAYER CR/NI THIN-FILM STRUCTURES DEPOSITED ON SUBSTRATES WITH DIFFERENT ROUGHNESS

被引：36
|
作者：
ZALAR, A [1 ]
HOFMANN, S [1 ]
机构：
[1] MAX PLANCK INST MET RES,INST WERKSTOFFWISSENSCH,D-7000 STUTTGART 80,FED REP GER
来源：
VACUUM | 1987年 / 37卷 / 1-2期
关键词：
D O I：
10.1016/0042-207X(87)90110-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
CHROMIUM AND ALLOYS
引用
收藏
页码：169 / 173
页数：5
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