DEPTH RESOLUTION OF MULTILAYER CR/NI THIN-FILM STRUCTURES DEPOSITED ON SUBSTRATES WITH DIFFERENT ROUGHNESS

被引：36

作者：

ZALAR, A ^{[1
]}

HOFMANN, S ^{[1
]}

机构：

[1] MAX PLANCK INST MET RES,INST WERKSTOFFWISSENSCH,D-7000 STUTTGART 80,FED REP GER

来源：

VACUUM | 1987年 / 37卷 / 1-2期

关键词：

D O I：

10.1016/0042-207X(87)90110-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

CHROMIUM AND ALLOYS

引用

页码：169 / 173

页数：5

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