DIELECTRIC PROPERTIES OF ALUMINUM-OXIDE FILMS

被引：122

|

作者：

BIREY, H

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1978年 / 49卷 / 05期

关键词：

D O I：

10.1063/1.325174

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2898 / 2904

页数：7

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