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Shanghai Jiao Tong Univ, Natl Key Lab Nano Micro Fabricat Technol, Inst Micronano Sci & Technol,Minist Educ, Dept Bionano Sci & Engn,Key Lab Thin Film & Micro, Shanghai 200240, Peoples R China Shanghai Jiao Tong Univ, Natl Key Lab Nano Micro Fabricat Technol, Inst Micronano Sci & Technol,Minist Educ, Dept Bionano Sci & Engn,Key Lab Thin Film & Micro, Shanghai 200240, Peoples R China