INGAAS-GAAS-ALGAAS STRAINED-LAYER QUANTUM-WELL LASERS BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION

被引:3
|
作者
YORK, PK
BEERNINK, KJ
FERNANDEZ, GE
COLEMAN, JJ
机构
[1] Compound Semicond. Microelectron Lab., Illinois Univ., Urbana, IL
关键词
D O I
10.1088/0268-1242/5/6/007
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The structure and characteristics of low threshold long wavelength ( lambda >1.07 mu m) strained-layer InGaAs-GaAs-AlGaAs quantum well broad area lasers and, in particular, buried heterostructure strained-layer lasers formed by wet chemical etching and a two-step metal-organic chemical vapour deposition growth process are reviewed. Low aluminium composition confining layers allow for high-quality regrowth interfaces and effective use of a silicon dioxide mask for selective epitaxy. The buried heterostructure lasers reported have narrow active region stripe widths, low threshold currents, high output powers, and operate on a stable fundamental lateral mode.
引用
收藏
页码:508 / 511
页数:4
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