ELECTROSTATIC ACTIVATION OF MICROMECHANICAL RESONATORS

被引：1
|
作者：
FATAH, RMA [1 ]
机构：
[1] UNIV LONDON UNIV COLL, DEPT ELECTR & ELECT ENGN, LONDON WC1E 7JE, ENGLAND
来源：
ELECTRONICS LETTERS | 1991年 / 27卷 / 02期
关键词：
RESONATORS; LASERS AND LASER APPLICATIONS;
D O I：
10.1049/el:19910107
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Micromechanical resonators have been fabricated and driven into mechanical vibration by application of a time-dependent potential difference of less than 1 V. A laser beam guided via a fibre optic coupler was used to detect the mechanical vibration.
引用
收藏
页码：166 / 168
页数：3
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