ELECTROSTATIC ACTIVATION OF MICROMECHANICAL RESONATORS

被引：1
|
作者：
FATAH, RMA [1 ]
机构：
[1] UNIV LONDON UNIV COLL, DEPT ELECTR & ELECT ENGN, LONDON WC1E 7JE, ENGLAND
来源：
ELECTRONICS LETTERS | 1991年 / 27卷 / 02期
关键词：
RESONATORS; LASERS AND LASER APPLICATIONS;
D O I：
10.1049/el:19910107
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Micromechanical resonators have been fabricated and driven into mechanical vibration by application of a time-dependent potential difference of less than 1 V. A laser beam guided via a fibre optic coupler was used to detect the mechanical vibration.
引用
收藏
页码：166 / 168
页数：3
相关论文
共 50 条
  • [1] MECHANISMS OF OPTICAL ACTIVATION OF MICROMECHANICAL RESONATORS
    FATAH, RMA
    SENSORS AND ACTUATORS A-PHYSICAL, 1992, 33 (03) : 229 - 236
  • [2] Electrostatic charge and field sensors based on micromechanical resonators
    Riehl, PS
    Scott, KL
    Muller, RS
    Howe, RT
    Yasaitis, JA
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2003, 12 (05) : 577 - 589
  • [3] Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations
    Yoneoka, Shingo
    Salvia, James C.
    Bahl, Gaurav
    Melamud, Renata
    Chandorkar, Saurabh A.
    Kenny, Thomas W.
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2010, 19 (05) : 1270 - 1272
  • [4] Support Losses in Micromechanical Resonators Under Electrostatic and Piezoelectric Actuations
    Zhu, Rong
    Zhang, Guoping
    IEEE SENSORS JOURNAL, 2013, 13 (03) : 1105 - 1109
  • [5] Electrostatic transducers for micromechanical resonators: Free space and solid dielectric
    Kaajakari, Ville
    Alastalo, Ari T.
    Mattila, Tomi
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2006, 53 (12) : 2484 - 2489
  • [6] Qubit thermometry for micromechanical resonators
    Dipartimento di Fisica, Università Degli Studi di Milano, I-20133 Milano, Italy
    不详
    不详
    Phys Rev A, 3
  • [7] Wireless actuation of micromechanical resonators
    Mateen, Farrukh
    Maedler, Carsten
    Erramilli, Shyamsunder
    Mohanty, Pritiraj
    MICROSYSTEMS & NANOENGINEERING, 2016, 2
  • [8] Qubit thermometry for micromechanical resonators
    Brunelli, Matteo
    Olivares, Stefano
    Paris, Matteo G. A.
    PHYSICAL REVIEW A, 2011, 84 (03):
  • [9] Energy Dissipation in Micromechanical Resonators
    Ayazi, Farrokh
    Sorenson, Logan
    Tabrizian, Roozbeh
    MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS III, 2011, 8031
  • [10] Wireless actuation of micromechanical resonators
    Farrukh Mateen
    Carsten Maedler
    Shyamsunder Erramilli
    Pritiraj Mohanty
    Microsystems & Nanoengineering, 2
12345