RECORDING OF HOLOGRAPHIC OPTICAL-ELEMENTS ON AS-S-SE LAYERS

In this work the peculiarities of periodic relief formation by means of using the As-S-Se layers photostimulated solubility changes are considered. Holographic diffraction grating recording and production processes were investigated. It is shown that the depth and form of the relief obtained depend on exposure level, etching time and rate, layer parameters, etc. Model calculations of relief formation processes were also carried out. The obtained SEM groove profiles were mainly described by cycloidal dependencies. It is shown that, by means of changing the exposure and development conditions, it is possible to obtain grating groove profiles close to sinusoidal. Spectral properties of the obtained gratings were investigated. Achieved modulation depths (groove height to period ratio) provided high diffraction efficiency values similar to 60% (in absolute values) in nonpolarized light, similar to 80% in S-polarization.