NITRIDATION OF SI(111) BY NITROGEN-ATOMS

被引：90
|
作者：
SCHROTT, AG
FAIN, SC
机构：
来源：
SURFACE SCIENCE | 1981年 / 111卷 / 01期
关键词：
D O I：
10.1016/0039-6028(81)90473-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：39 / 52
页数：14
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