ISSUES ENCOUNTERED WITH MULTILEVEL INTERCONNECT PROCESSING IN THE SUB-MICRON REGIME

被引：0
|
作者：
MATTOX, RJ [1 ]
WILSON, SR [1 ]
机构：
[1] MOTOROLA INC,SEMICOND PROD SECT,MESA,AZ 85202
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C134 / C134
页数：1
相关论文
共 50 条
  • [1] Jitter in deep sub-micron interconnect
    Jang, JW
    Xu, S
    Burleson, W
    IEEE COMPUTER SOCIETY ANNUAL SYMPOSIUM ON VLSI, PROCEEDINGS: NEW FRONTIERS IN VLSI DESIGN, 2005, : 84 - 89
  • [2] Optimising bandwidth over deep sub-micron interconnect
    Pamunuwa, D
    Zheng, LR
    Tenhunen, H
    2002 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOL IV, PROCEEDINGS, 2002, : 193 - 196
  • [3] ELECTROMIGRATION IN SUB-MICRON INTERCONNECTS AND MULTILEVEL INTERCONNECTION
    KNOK, T
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (08) : C364 - C364
  • [4] A scaling scheme and optimization methodology for deep sub-micron interconnect
    Oh, SY
    Rahmat, K
    Nakagawa, OS
    Moll, J
    INTERNATIONAL CONFERENCE ON COMPUTER DESIGN - VLSI IN COMPUTERS AND PROCESSORS, PROCEEDINGS, 1996, : 320 - 325
  • [5] MOS and interconnect model extraction experiments in sub-micron technology
    Sicard, E
    Delmas, S
    Dupire, M
    ICEMI '97 - CONFERENCE PROCEEDINGS: THIRD INTERNATIONAL CONFERENCE ON ELECTRONIC MEASUREMENT & INSTRUMENTS, 1997, : 1 - 4
  • [6] Thermal Issues in Deep Sub-Micron FDSOI Circuits
    Baltaci, Can
    Leblebici, Yusuf
    2016 12TH CONFERENCE ON PH.D. RESEARCH IN MICROELECTRONICS AND ELECTRONICS (PRIME), 2016,
  • [7] Integration of CMP into deep sub-micron multilevel metallization circuits
    Pramanik, D
    Weling, M
    CHEMICAL MECHANICAL PLANARIZATION I: PROCEEDINGS OF THE FIRST INTERNATIONAL SYMPOSIUM ON CHEMICAL MECHANICAL PLANARIZATION, 1997, 96 (22): : 47 - 58
  • [8] PATTERNING OF SUB-MICRON METAL FEATURES AND PILLARS IN MULTILEVEL METALLIZATION
    KULKARNI, VD
    SHARMA, NC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (12) : 3094 - 3098
  • [9] Partitioned cache shadowing for deep sub-micron (DSM) regime
    Xu, H
    Somani, A
    11TH PACIFIC RIM INTERNATIONAL SYMPOSIUM ON DEPENDABLE COMPUTING, PROCEEDINGS, 2005, : 183 - 190
  • [10] PLASMA WAFER PROCESSING INTO THE SUB-MICRON ERA.
    Dance, Brian
    New Electronics, 1985, 18 (11): : 37 - 38
12345