共 50 条
- [21] ETCHING OF POLYSILICON IN A HIGH-DENSITY ELECTRON-CYCLOTRON RESONANCE PLASMA WITH COLLIMATED MAGNETIC-FIELD JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (04): : 1312 - 1319
- [22] PROCESSING UNIFORMITY IMPROVEMENT BY MAGNETIC-FIELD DISTRIBUTION CONTROL IN ELECTRON-CYCLOTRON RESONANCE PLASMA CHAMBER JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1993, 32 (1B): : 322 - 326
- [23] MAGNETIC-FIELD GRADIENT EFFECTS ON ION ENERGY FOR ELECTRON-CYCLOTRON RESONANCE MICROWAVE PLASMA STREAM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1988, 6 (01): : 25 - 29
- [27] MODULATIONAL INSTABILITIES OF ELECTRON-CYCLOTRON WAVES PHYSICAL REVIEW A, 1986, 34 (02): : 1582 - 1583
- [28] CURRENT GENERATION BY ELECTRON-CYCLOTRON WAVES NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA B-GENERAL PHYSICS RELATIVITY ASTRONOMY AND MATHEMATICAL PHYSICS AND METHODS, 1983, 75 (01): : 78 - 86