3-DIMENSIONAL MATHEMATICAL-MODELING OF TRANSPORT PROCESSES IN CVD REACTORS

被引：0

|

作者：

HE, Y

SAHAI, Y

机构：

[1] BOUTUO INST IRON & STEEL TECHNOL,BOUTUO,PEOPLES R CHINA

[2] OHIO STATE UNIV,DEPT MET ENGN,COLUMBUS,OH 43210

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 11期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：C626 / C626

页数：1

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