AN ULTRASONIC MOTOR USING NON-AXISYMMETRIC VIBRATION MODES OF A PIEZO-CERAMIC ANNULAR PLATE

被引:5
|
作者
TAKANO, T [1 ]
TOMIKAWA, Y [1 ]
OGASAWARA, T [1 ]
HIRATA, H [1 ]
机构
[1] YAMAGATA UNIV,DEPT ELECT ENGN,YONEZAWA,YAMAGATA 992,JAPAN
关键词
D O I
10.7567/JJAPS.28S2.202
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:202 / 205
页数:4
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