USE OF RING GAP DISCHARGES FOR HIGH-RATE VACUUM COATING

被引：0
|
作者：
SCHILLER, S [1 ]
HEISIG, U [1 ]
GOEDICKE, K [1 ]
机构：
[1] FORSCH INST MANFRED VON ARDENNE,DDR-8051 DRESDEN,GER DEM REP
来源：
THIN SOLID FILMS | 1977年 / 40卷 / JAN期
关键词：
D O I：
10.1016/0040-6090(77)90112-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：139 / 139
页数：1
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