PLASMA CHEMISTRY OF FLUOROCARBONS AS RELATED TO PLASMA-ETCHING AND PLASMA POLYMERIZATION

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作者：

KAY, E

COBURN, J

DILKS, A

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TOPICS IN CURRENT CHEMISTRY | 1980年 / 94卷

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O6 [化学];

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0703 ;

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页码：1 / 42

页数：42

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