CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS

被引：0
|
作者：
RAMAN, VK
MAHMOOD, F
MCMAHON, RA
AHMED, H
JEYNES, C
HUTT, KW
COOPER, N
GODFREY, DJ
机构：
[1] UNIV CAMBRIDGE,DEPT PHYS,MICROELECTR LAB,CAMBRIDGE CB4 4FW,ENGLAND
[2] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND
[3] UNIV CAMBRIDGE,DEPT MAT SCI & MET,CAMBRIDGE CB2 3QZ,ENGLAND
[4] GEC RES LTD,HIRST RES CTR,WEMBLEY HA9 7PP,MIDDX,ENGLAND
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C125 / C125
页数：1
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