H2O2-HF-C4O6H6 (TARTARIC ACID)H2O ETCHING SYSTEM FOR CHEMICAL POLISHING OF GASB

被引：21
|
作者：
BERISHEV, IE [1 ]
DEANDA, F [1 ]
MISHOURNYI, VA [1 ]
OLVERA, J [1 ]
ILYINSKAYA, ND [1 ]
VASILYEV, VI [1 ]
机构：
[1] AF IOFFE PHYS TECH INST,ST PETERSBURG,RUSSIA
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1995年 / 142卷 / 10期
关键词：
D O I：
10.1149/1.2050040
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
We present the results of a study of H2O2:HF:C4O6H6 (tartaric acid):H2O solution for chemical polishing of GaSb wafers. The influence of etching solution composition on surface morphology was studied. The solutions investigated varied in H2O2 (2.0-3.0 mol) and HF (0.0-5.0 mol) concentrations, but contained a constant concentration of tartaric acid (0.7 mol). it was found that the etchant has excellent polishing properties for GaSb wafers when the HF concentration was less than 1.5 mol. For HF concentration larger than 1.5, the etchant solution produced rough surfaces. The dependencies of the etching rate on solution composition, temperature, and etching time were studied.
引用
收藏
页码：L189 / L191
页数：3
相关论文
共 50 条
  • [41] Dicarboxylate groups as ligands and anions in aquamagnesium complexes:: Crystal structures of [Mg (C4H2O4)(H2O)4] • H2O and [Mg(H2O)6](C4HO4)2 • 2H2O ((C4H2O4)2- = fumarate;: (C4HO4)- = hydrogenacetylenedicarboxylate)
    Baier, J
    Thewalt, U
    ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 2002, 628 (08): : 1890 - 1894
  • [42] Synthesis and crystal structure of [Zn(H2O)4(C4H2O4)] • H2O
    XIe, HZ
    Zheng, YQ
    Shou, KQ
    JOURNAL OF COORDINATION CHEMISTRY, 2003, 56 (15) : 1291 - 1297
  • [43] Crystal structures of acid ethylenediaminetetraacetates [Cd(H2Edta)(H2O)]·2H2O and [Mn(H2O)4][Mn(HEdta)(H2O)]2 ·4H2O
    Polyakova, I.N.
    Poznyak, A.L.
    Sergienko, V.S.
    Stopolyanskaya, L.V.
    Kristallografiya, 2001, 46 (01): : 47 - 53
  • [44] Crystal structures of acid ethylenediaminetetraacetates [Cd(H2Edta)(H2O)] · 2H2O and [Mn(H2O)4][Mn(HEdta)(H2O)]2 · 4H2O
    I. N. Polyakova
    A. L. Poznyak
    V. S. Sergienko
    L. V. Stopolyanskaya
    Crystallography Reports, 2001, 46 : 40 - 45
  • [45] Crystal structures of acid ethylenediaminetetraacetates [Cd(H2Edta)(H2O)]•2H2O and [Mn(H2O)4][Mn(HEdta)(H2O)]2•4H2O
    Polyakova, IN
    Poznyak, AL
    Sergienko, VS
    Stopolyanskaya, LV
    CRYSTALLOGRAPHY REPORTS, 2001, 46 (01) : 40 - 45
  • [46] NMR PROTON RELAXATION AND CHEMICAL-EXCHANGE IN THE SYSTEM (H2O)-O-16/(H2O)-O-17-[H-2(6)]DIMETHYLSULPHOXIDE
    GORDALLA, BC
    ZEIDLER, MD
    MOLECULAR PHYSICS, 1991, 74 (05) : 975 - 984
  • [47] Synthesis and Structural Studies of [Na(C7H6O4)(H2O)3](C7H5O4) · 2H2O
    Alina Kula
    Zofia Rzączyńska
    Liliana Mazur
    Journal of Chemical Crystallography, 2008, 38 : 723 - 728
  • [48] Synthesis and structural studies of [Na(C7H6O4)(H2O)3](C7H5O4) • 2H2O
    Kula, Alina
    Rzaczynska, Zofia
    Mazur, Liliana
    JOURNAL OF CHEMICAL CRYSTALLOGRAPHY, 2008, 38 (10) : 723 - 728
  • [49] SYSTEM C8H10O2N4-C7H6O6S-H2O AT 25 DEGREESC
    AKBAEV, A
    EZHOVA, VV
    JOURNAL OF APPLIED CHEMISTRY OF THE USSR, 1976, 49 (06): : 1451 - 1452
  • [50] ETCHING GE WITH MIXTURES OF HF-H2O2-H2O
    BLOEM, J
    VANVESSEM, JC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (01) : 33 - 36
12345