DETECTION OF MONOLAYER QUANTITIES OF OXYGEN ON SILICON USING ENERGY-DISPERSIVE X-RAY SPECTROMETRY

被引：9

作者：

MUSKET, RG

STRAUSSER, YE

机构：

[1] HEWLETT PACKARD CO,SOLID STATE LAB,PALO ALTO,CA 94304

[2] KEVEX CORP,FOSTER CITY,CA 94404

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 05期

关键词：

D O I：

10.1063/1.91737

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：478 / 480

页数：3

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