THIN-FILM TRANSFORMER FABRICATED BY A DRY PROCESS

被引：0
|
作者：
YACHI, T
MINO, M
TAGO, A
YANAGISAWA, K
机构：
来源：
NTT REVIEW | 1992年 / 4卷 / 03期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new thin film transformer for use in micro-switching converters of portable equipment is described. This transformer, consisting of planar Cu film coils and CoZrRe amorphous magnetic film cores on a Si substrate, is formed by a dry process similar to that used for fabricating silicon devices. It is about 0.3 mm thick, and 4 x 4 mm2. This thin film transformer is used in a forward converter, which operates well at 30 MHz. This work is a first step towards fabricating micro-switching converters whose magnetic components are integrated into a power IC.
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页码：46 / 50
页数：5
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