DEVELOPMENT CHALLENGES OF ATOMIC LAYER EPITAXY

被引：0
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作者：
TUOMO, S
机构：
来源：
ACTA POLYTECHNICA SCANDINAVICA-CHEMICAL TECHNOLOGY SERIES | 1990年 / 195期
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：93 / 106
页数：14
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