FORMATION OF THERMALLY STABLE HIGH-RESISTIVITY ALGAAS BY OXYGEN IMPLANTATION

被引：58
|
作者：
PEARTON, SJ [1 ]
IANNUZZI, MP [1 ]
REYNOLDS, CL [1 ]
PETICOLAS, L [1 ]
机构：
[1] AT&T BELL LABS,READING,PA 19604
来源：
APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 05期
关键词：
D O I：
10.1063/1.99477
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：395 / 397
页数：3
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